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RP3500SA N2 Purge System Standalone

RP3500SA N2 Purge System Standalone

N2 Purge Load Port Compliant with SEMI for All FOUPs 【Features】 ○ Compatible with all FOUPs regardless of type ○ Gas is injected from the door side while the FOUP door is open, adopting a front purge method (up to 200 LPM injection) ○ Allows a large volume of gas to flow at once, significantly improving replacement time and total gas flow ○ Basically conforms to SEMI standards ● For other functions and details, please download the catalog.

• Company：ライト製作所 本社
• Price：Other

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